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Silicon growth furnace is a kind of equipment which works on the condition of being aerated (to protect gas), and then silicon growth from silicon polycrystalline rods.
The main technical parameters and components of Silicon growth furnace
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Production capacity and external conditions
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The technical parameters of furnace body
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1 production capacity:4piece/batch;6piece/batch
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1,Max stroke of upper shaft:2300mm
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2,Specification of raw material:Φ(45-50)×500mm
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2,Effective stroke of upper shaft:2300mm
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3,Resistivity:<100Ω
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3,Max stroke of lower shaft:550mm
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,Specification of product:Φ(7-10)×2100mm
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4,Effective stroke of lower shaft: 530mm
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5,Voltage of heating power supply:3-phase 380V
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5,Rapid rise/fall of upper shaft:1300mm/min 700mm/min
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6,High frequency induction heating power supply:power 40/60KW
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6,Slow rise/fall of upper shaft:0-60mm/min
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7,Vacuum degree for blow-in≤3Pa
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7,Rotating speed of lower shaft: 0-30rpm
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8,Slow rise/fall of lower shaft:0.02-10mm/min
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9,Rapid rise/fall of lower shaft:about 150mm/min about 75mm/min
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10,Radial pulsation of lower shaft:0.1mm
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11,Axial pulsation of lower shaft:0.05mm
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12,Axiality of upper / lower shaft:1.5mm
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